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Proceedings Paper

Application of imprint technologies for creation of micro- and nano-scale pattern
Author(s): Thomas Glinsner; Michael Beutl; Steven Dwyer; Paul Lindner; Markus Wimplinger; Paul Kettner; Samy Hanna; Gunther Leising
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Paper Abstract

Nanoimprinting is a low cost method to fabricate features from μm down to the nm-range. Different nanofabrication techniques, namely hot embossing, UV-nanoimprinting as well as micro-contact printing will be discussed. Recently achieved results with nanoimprinting methods will be demonstrated.

Paper Details

Date Published: 29 March 2004
PDF: 6 pages
Proc. SPIE 5275, BioMEMS and Nanotechnology, (29 March 2004); doi: 10.1117/12.522993
Show Author Affiliations
Thomas Glinsner, EV Group, Inc. (Austria)
Michael Beutl, Joanneum Research (Austria)
Steven Dwyer, EV Group, Inc. (United States)
Paul Lindner, EV Group, Inc. (Austria)
Markus Wimplinger, EV Group, Inc. (United States)
Paul Kettner, EV Group, Inc. (Austria)
Samy Hanna, Austria Technologie und Systemtechnik AG (Austria)
Gunther Leising, Joanneum Research (Austria)
Austria Technologie und Systemtechnik AG (Austria)

Published in SPIE Proceedings Vol. 5275:
BioMEMS and Nanotechnology
Dan V. Nicolau; Uwe R. Muller; John M. Dell, Editor(s)

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