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Proceedings Paper

Microneedle array and insertion guide array for safe use of biomedical applications
Author(s): Sommawan Khumpuang; Ryutaro Maeda; Susumu Sugiyama
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Paper Abstract

A new method of using silicon microneedle array in Bio-Medical applications is introduced in this work. The hollow microneedle array with the facilitation of an insertion guide array have been designed and fabricated. The needles can be pushed down through the second layer of human skin with less-bending. The tip of microneedle will be led by the insertion guide to pierce the skin perpendicularly. The silicon bulk micromachining technique using an inductively coupled plasma (ICP) etcher has been employed to fabricate the microneedle array and the insertion guide array. The array chips are 5x5 mm2 for both structures. The needle array chip contains 100 microneedles with 100μm and 30 μm of the outer diameter and the hole diameter respectively. The guide array chip is 100 μm-thick and contains 100 guiding holes with 120 μm diameter. A buckling test of microneedle shows the result that there was no microneedle broken during the test via the guiding holes. Contrary, there were several microneedles broken during the penetration without the facilitation of the guide. The finite-element analysis also supports the test result. After the insertion with guiding has been tested and proved, a wet etching process was added in order to obtain sharper tips.

Paper Details

Date Published: 29 March 2004
PDF: 8 pages
Proc. SPIE 5275, BioMEMS and Nanotechnology, (29 March 2004); doi: 10.1117/12.522939
Show Author Affiliations
Sommawan Khumpuang, Ritsumeikan Univ. (Japan)
Ryutaro Maeda, National Institute of Advanced Industrial Science and Technology (Japan)
Susumu Sugiyama, Ritsumeikan Univ. (Japan)


Published in SPIE Proceedings Vol. 5275:
BioMEMS and Nanotechnology
Dan V. Nicolau; Uwe R. Muller; John M. Dell, Editor(s)

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