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Proceedings Paper

Hydrostatic actuation in MEMS
Author(s): Simon Mutzenich; Thurai Vinay
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Proc. SPIE 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, ; doi: 10.1117/12.522855
Show Author Affiliations
Simon Mutzenich, RMIT Univ. (Australia)
Thurai Vinay, RMIT Univ. (Australia)


Published in SPIE Proceedings Vol. 5276:
Device and Process Technologies for MEMS, Microelectronics, and Photonics III
Jung-Chih Chiao; Alex J. Hariz; David N. Jamieson; Giacinta Parish; Vijay K. Varadan, Editor(s)

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