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Proceedings Paper

Comparison between conductometric and layered SAW hydrogen gas sensor
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Paper Abstract

A comparison between the performance of conductometric and layered surface acoustic wave (SAW) hydrogen sensors is presented. Both sensor structures employ an R.F. magnetron sputtered tungsten trioxide (WO3) thin film as a selective layer for hydrogen (H2) sensing applications. The conductometric device is based on an alumina substrate, while the layered SAW device structure is fabricated on a 36° Y-cut, X-propagating LiTaO3 substrate with a zinc oxide (ZnO) guiding layer. The sensors were investigated for different operational temperatures and various concentrations of H2 in synthetic air.

Paper Details

Date Published: 30 March 2004
PDF: 9 pages
Proc. SPIE 5274, Microelectronics: Design, Technology, and Packaging, (30 March 2004); doi: 10.1117/12.522224
Show Author Affiliations
Samuel James Ippolito, RMIT Univ. (Australia)
CRC for MicroTechnology (Australia)
Sasikaran Kandasamy, RMIT Univ. (Australia)
Kourosh Kalantar-zadeh, RMIT Univ. (Australia)
CRC for MicroTechnology (Australia)
Wojtek Wlodarski, RMIT Univ. (Australia)
CRC for MicroTechnology (Australia)
Anthony Holland, RMIT Univ. (Australia)


Published in SPIE Proceedings Vol. 5274:
Microelectronics: Design, Technology, and Packaging
Derek Abbott; Kamran Eshraghian; Charles A. Musca; Dimitris Pavlidis; Neil Weste, Editor(s)

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