Share Email Print
cover

Proceedings Paper

Development of a 3-DOF in-parallel compliant micromotion stage for micromanipulation
Author(s): Jingjun Yu; Shusheng Bi; Guanghua Zong
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

This paper addresses the design and control issues of a novel micromanipulator which uses a 3-DOF parallel compliant mechanism driven by PZT actuators. Based on the pseudo-rigid-body model of the mechanism, both its conceptual design considerations and the final prototype are outlined first. In order to achieve a fine close-loop control for the PZT, a control law called Variable Speed Integral PI with Switched Parameters is employed based on a simplified but effective dynamic model of PZT actuators. Results from performance testing of the prototype compliant micromanipulator demonstrate that it has repeatability with less than 1 micron. The compliant stage is used as a high-precision bioengineering-oriented micromanipulator.

Paper Details

Date Published: 2 September 2003
PDF: 6 pages
Proc. SPIE 5253, Fifth International Symposium on Instrumentation and Control Technology, (2 September 2003); doi: 10.1117/12.522201
Show Author Affiliations
Jingjun Yu, Beijing Univ. of Aeronautics and Astronautics (China)
Shusheng Bi, Beijing Univ. of Aeronautics and Astronautics (China)
Guanghua Zong, Beijing Univ. of Aeronautics and Astronautics (China)


Published in SPIE Proceedings Vol. 5253:
Fifth International Symposium on Instrumentation and Control Technology
Guangjun Zhang; Huijie Zhao; Zhongyu Wang, Editor(s)

© SPIE. Terms of Use
Back to Top