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Proceedings Paper

Design and fabrication of PIN photodiode used in PET photon detection
Author(s): Bingruo Chen; Mu Wu; Dong-Qing Wei; Yang Gui
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Paper Abstract

The silicon PIN photodiode is small size and cheap cost, so we hope that it can replace PMT as detector used in PET photon detection. The Si PIN photodiode that is satisfied with detecting PET photon must enhance responsibility for short-wave light, respond to weak signal and operate in high speed. The characteristics of PIN device with single crystal silicon substrate are analyzed, and a PIN photodiode made of epitaxial wafer with high resistivity is presented. By choosing proper configuration and material parameters, the performance of PIN photodiode is improved, and the main photoelectic characteristics of samples have achieved the requirement of design.

Paper Details

Date Published: 12 May 2004
PDF: 4 pages
Proc. SPIE 5280, Materials, Active Devices, and Optical Amplifiers, (12 May 2004); doi: 10.1117/12.522164
Show Author Affiliations
Bingruo Chen, Wuhan Univ. (China)
Mu Wu, Wuhan Univ. (China)
Dong-Qing Wei, Wuhan Univ. (China)
Yang Gui, Wuhan Univ. (China)


Published in SPIE Proceedings Vol. 5280:
Materials, Active Devices, and Optical Amplifiers
Connie J. Chang-Hasnain; Dexiu Huang; Yoshiaki Nakano; Xiaomin Ren, Editor(s)

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