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Proceedings Paper

Fabrication of passively aligned micro-optics using focused ion beam
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Paper Abstract

Integration of micro-optical elements presents numerous challenges to the optical engineer in both fabrication and integration schemes. Therefore, prototyping integrated micro-optics is somewhat prohibitive due to cost and complexity. In this paper, we present a novel technique based on a subtractive milling process for Focused Ion Beam (FIB) milling of micro-optics into semiconductor devices. Results are presented for an integrated micro-lens in a silicon v-groove turning mirror for a passively aligned optical element.

Paper Details

Date Published: 29 December 2003
PDF: 10 pages
Proc. SPIE 5347, Micromachining Technology for Micro-Optics and Nano-Optics II, (29 December 2003); doi: 10.1117/12.522067
Show Author Affiliations
Waleed S. Mohammed, CREOL/Univ. of Central Florida (United States)
Eric G. Johnson, CREOL/Univ. of Central Florida (United States)


Published in SPIE Proceedings Vol. 5347:
Micromachining Technology for Micro-Optics and Nano-Optics II
Eric G. Johnson; Gregory P. Nordin, Editor(s)

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