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Proceedings Paper

Study on microdisplacement measurement by laser interference and image processing methods
Author(s): Lei Zheng; Jia-dao Wang; Xianmei Kong; Da-rong Chen; Zhongyou Liu; Jin Qian; Yongjian Li
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Paper Abstract

This paper presents a measurement system that can measure micro displacement by laser interference and image process methods. The displacement is measured by testing the relative moving distance between the movable mirror and the fixed mirror. Based on Michelson interference theory, the interference stripe images produced by a monochromatic laser source is collected by the CCD, which is used in the system to track the motion of PZT. The curve of light distribution is analyzed and dealt by Fourier Transformation and Low-pass Filtering methods. Least Squares Fit method is used to get normal amplitude, angle frequency and phase of the curve of light distribution and account the change of phases. Applying this measuring system, the micro-displacement is measured and obtains good test results.

Paper Details

Date Published: 2 September 2003
PDF: 6 pages
Proc. SPIE 5253, Fifth International Symposium on Instrumentation and Control Technology, (2 September 2003); doi: 10.1117/12.521907
Show Author Affiliations
Lei Zheng, Tsinghua Univ. (China)
Jia-dao Wang, Tsinghua Univ. (China)
Xianmei Kong, Tsinghua Univ. (China)
Da-rong Chen, Tsinghua Univ. (China)
Zhongyou Liu, National Institute of Metrology (China)
Jin Qian, National Institute of Metrology (China)
Yongjian Li, National Institute of Metrology (China)

Published in SPIE Proceedings Vol. 5253:
Fifth International Symposium on Instrumentation and Control Technology
Guangjun Zhang; Huijie Zhao; Zhongyu Wang, Editor(s)

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