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Proceedings Paper

Novel high-precision optical thin film monitor
Author(s): Cheng Zhang; Weiqiang Lu; Yongtian Wang
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Paper Abstract

High-precision optical thin-film deposition monitor is a key technology for modern optical thin-film fabrication. A new monitor is developed based on double beam one lock-in amplifier. It allows the precise cut off of layers through the deposition. Experimental results show that the monitor can be used in a high-precision, fully automatic control optical thin-film deposition system.

Paper Details

Date Published: 2 September 2003
PDF: 4 pages
Proc. SPIE 5253, Fifth International Symposium on Instrumentation and Control Technology, (2 September 2003); doi: 10.1117/12.521691
Show Author Affiliations
Cheng Zhang, Beijing Institute of Technology (China)
Weiqiang Lu, Beijing Institute of Technology (China)
Yongtian Wang, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 5253:
Fifth International Symposium on Instrumentation and Control Technology

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