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Proceedings Paper

Compact integrated waveguide turning mirror in SOI
Author(s): Wenhui Wang; Yanzhe Tang; Liping Cui; Yaming Wu; Jianyi Yang; Yuelin Wang
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Paper Abstract

Planar lightwave circuits based on silicon are playing important roles in integrated optical systems. The integrated waveguide turning mirror (IWTM) is essential component for the compactness of optical devices. We designed and fabricated an integrated waveguide turning mirror with a 90° directional change in SOI. The mirror was etched by induct-coupled-plasma etching (ICP) first. Then the surface was enhanced by wet anisotropic etching. This two-step process introduced a compact IWTM with smooth and vertical surface. Compared with the mirror fabricated by wet anisotropic etching only, the mirror fabricate by the two-step process is better to meet the requirement of compact design.

Paper Details

Date Published: 30 April 2004
PDF: 5 pages
Proc. SPIE 5279, Optical Fibers and Passive Components, (30 April 2004); doi: 10.1117/12.521682
Show Author Affiliations
Wenhui Wang, Shanghai Institute of Microsystems and Information Technology (China)
Yanzhe Tang, Zhejiang Univ. (China)
Liping Cui, Shanghai Institute of Microsystems and Information Technology (China)
Yaming Wu, Shanghai Institute of Microsystems and Information Technology (China)
Jianyi Yang, Shanghai Institute of Microsystems and Information Technology (China)
Yuelin Wang, Shanghai Institute of Microsystems and Information Technology (China)
Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 5279:
Optical Fibers and Passive Components
Steven Shen; Shuisheng Jian; Katsunari Okamoto; Kenneth L. Walker, Editor(s)

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