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Proceedings Paper

A novel method of fabricating Fabry-Perot cavity employing MEMS wet-etching process
Author(s): Min Xiang; Yanmin Cai; Yaming Wu; Jianyi Yang; Yuelin Wang
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Paper Abstract

A new method is presented in this paper to fabricate Fabry-Perot (FP) cavity with MEMS bulk wet-etching technology, through which FP cavities can be achieved with the cavity length from several microns to tens of microns. The parallelism of mirror elements can be well achieved without electrostatic control. Some FP cavities were achieved that the insertion loss was less than -8dB, the full width half maximum (FWHM) was about 2 nm, and the efficient finesse is up to 50. Some factors which influence the finesse have also been analyzed. The further work is ongoing.

Paper Details

Date Published: 30 April 2004
PDF: 7 pages
Proc. SPIE 5279, Optical Fibers and Passive Components, (30 April 2004); doi: 10.1117/12.521680
Show Author Affiliations
Min Xiang, Shanghai Institute of Microsystems and Information Technology (China)
Yanmin Cai, Shanghai Institute of Microsystems and Information Technology (China)
Yaming Wu, Shanghai Institute of Microsystems and Information Technology (China)
Jianyi Yang, Shanghai Institute of Microsystems and Information Technology (China)
Yuelin Wang, Shanghai Institute of Microsystems and Information Technology (China)


Published in SPIE Proceedings Vol. 5279:
Optical Fibers and Passive Components
Steven Shen; Shuisheng Jian; Katsunari Okamoto; Kenneth L. Walker, Editor(s)

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