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Proceedings Paper

Processes of manufacturing hologram diffraction gratings based on As-S-Se layers
Author(s): Sergey A. Kostyukevych; Peter E. Shepeljavi; Peter F. Romanenko; Nadya L. Moskalenko; Piotr M. Tomchuk
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Paper Abstract

Results of investigation of processes providing formation of hologram diffraction gratings based on As2S3 layers are represented. Using the method of atomic force microscopy the groove profile shape is studied for these gratings in dependency on exposure values. Carried out are measurements of their diffraction efficiency dependencies and analyzed is their relation to the relief shape of the grating surface.

Paper Details

Date Published: 8 August 2003
PDF: 6 pages
Proc. SPIE 5123, Advanced Optical Devices, Technologies, and Medical Applications, (8 August 2003); doi: 10.1117/12.521489
Show Author Affiliations
Sergey A. Kostyukevych, Institute of Semiconductor Physics (Ukraine)
Peter E. Shepeljavi, Institute of Semiconductor Physics (Ukraine)
Peter F. Romanenko, Institute of Semiconductor Physics (Ukraine)
Nadya L. Moskalenko, Institute of Semiconductor Physics (Ukraine)
Piotr M. Tomchuk, Institute of Semiconductor Physics (Ukraine)


Published in SPIE Proceedings Vol. 5123:
Advanced Optical Devices, Technologies, and Medical Applications
Janis Spigulis; Janis Teteris; Maris Ozolinsh; Andrejs Lusis, Editor(s)

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