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Proceedings Paper

Micromachined resonant gyroscope
Author(s): Anping Qiu; Shourong Wang; Bailing Zhou
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Paper Abstract

Resonant sensing has a number of advantages, including simpler dynamics and control, improved stability, large dynamic range, high resolution, and a quasidigital FM output. Resonant sensing is attractive in micromachined gyroscope application. In this paper, we present a new micromachined resonant gyroscope and briefly introduce the basic operating principle. The double-ended tuning fork (DETF) is an important element in DETF resonator. A theoretical treatment starting from a classical theory for Bernoulli-Euler beams to modal the operation of DETF is given. T The relation between the frequency shift and the applied force is also built. The simulation and the relation of the frequency shift and the applied force by the finite element analysis (FEA) are presented. The conclusion is that analytical analysis results are very close to the simulation results by FEA. Thus, usefulness of the analytical analysis results may be more efficient for our design of micromachined resonant gyroscopes.

Paper Details

Date Published: 2 September 2003
PDF: 5 pages
Proc. SPIE 5253, Fifth International Symposium on Instrumentation and Control Technology, (2 September 2003); doi: 10.1117/12.521461
Show Author Affiliations
Anping Qiu, Southeast Univ. (China)
Shourong Wang, Southeast Univ. (China)
Bailing Zhou, Southeast Univ. (China)


Published in SPIE Proceedings Vol. 5253:
Fifth International Symposium on Instrumentation and Control Technology
Guangjun Zhang; Huijie Zhao; Zhongyu Wang, Editor(s)

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