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Proceedings Paper

Performance of a novel nonplanar diaphragm and its application to optical sensing devices
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Paper Abstract

We present a new single-chip diaphragm-type Fabry-Perot microcavity pressure sensor with a novel single deeply corrugated diaphragm. Both analytical and experimental results have shown that some common issues, such as signal-averaging effect and cross-sensitivity to temperature with diaphragm-type Fabry-Perot microcavity pressure sensors, can be substantially alleviated by the proposed technique.

Paper Details

Date Published: 2 April 2004
PDF: 8 pages
Proc. SPIE 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, (2 April 2004); doi: 10.1117/12.521287
Show Author Affiliations
Weijun Wang, Nanyang Technological Univ. (Singapore)
Rongming Lin, Nanyang Technological Univ. (Singapore)
Da Gang Guo, Nanyang Technological Univ. (Singapore)
Tie Tun Sun, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 5276:
Device and Process Technologies for MEMS, Microelectronics, and Photonics III
Jung-Chih Chiao; Alex J. Hariz; David N. Jamieson; Giacinta Parish; Vijay K. Varadan, Editor(s)

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