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Proceedings Paper

Integrated micro- and nano-optical biosensor silicon devices CMOS compatible
Author(s): Laura M. Lechuga; Borja Sepulveda; Jose Sanchez del Rio; Francisco Blanco; Ana Calle; Carlos Dominguez
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Paper Abstract

We show the design, fabrication and testing of micro/nanobiosensor devices based on optical waveguides in a highly sensitive interferometric configuration and by using evanescent wave detection. The devices are fabricated by standard Silicon CMOS microelectronics technology after a precise design for achieving a high sensitivity for biosensing applications. Two integrated Mach-Zehnder interferometric (MZI) devices, using two technologies, have been developed: (a) a MZI Microdevice based on ARROW waveguide (b) a MZI Nanodevice based on TIR waveguide. Direct biosensing with both sensors has been tested, after a specific receptor coupling to the surface device using nanometer scale immobilization techniques. Further integration of the microoptical sensors, the microfluidics, the photodetectors and the CMOS electronics will render in a lab-on-a-chip microsystem.

Paper Details

Date Published: 1 July 2004
PDF: 15 pages
Proc. SPIE 5357, Optoelectronic Integration on Silicon, (1 July 2004); doi: 10.1117/12.521104
Show Author Affiliations
Laura M. Lechuga, Ctr. Nacional de Microelectronica (Spain)
Borja Sepulveda, Ctr. Nacional de Microelectronica (Spain)
Jose Sanchez del Rio, Ctr. Nacional de Microelectronica (Spain)
Francisco Blanco, IKERLAN Ctr. de Investigaciones Technologicas (Spain)
Ana Calle, Ctr. Nacional de Microelectronica (Spain)
Carlos Dominguez, Ctr. Nacional de Microelectronica (Spain)


Published in SPIE Proceedings Vol. 5357:
Optoelectronic Integration on Silicon
David J. Robbins; Ghassan E. Jabbour, Editor(s)

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