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Proceedings Paper

Interferometric measurements of the vibration of a silicon microbeam/cantilever unit used in atomic force microscopy (AFM)
Author(s): Krzysztof Patorski; Agata Jozwicka; Artur Kalinowski
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Paper Abstract

In the paper experimental results of microbeam/cantilever vibration measurements are presented. The cantilever under investigation is used as a sensor in a Atomic Force Microscope. Double-Beam Digital Interferometry with time averaging and interferogram processing was used for optimization of vibration mode visualization. Several two-frame methods with phase step between the frames were compared with the four-frame method with phase step π/2 between consecutive frames. The experimental results obtained prove that the four-frame method is the most appropriate for further quantitative amplitude and phase analysis.

Paper Details

Date Published: 6 October 2003
PDF: 4 pages
Proc. SPIE 5229, Laser Technology VII: Applications of Lasers, (6 October 2003); doi: 10.1117/12.520761
Show Author Affiliations
Krzysztof Patorski, Warsaw Univ. of Technology (Poland)
Agata Jozwicka, Warsaw Univ. of Technology (Poland)
Artur Kalinowski, Warsaw Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 5229:
Laser Technology VII: Applications of Lasers
Wieslaw L. Wolinski; Zdzislaw Jankiewicz; Ryszard Romaniuk, Editor(s)

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