Share Email Print
cover

Proceedings Paper

Specular-reflection-based flatness tester
Author(s): Shu-Guo Tang; Kevin G. Harding; Gregory O'Neil; Jin Cai
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The inspection of plastic film flatness is approached by utilizing the light specular reflection off the film. A grating image formed by the reflection provides the slope information of the film surface. The wedge test shows the specular reflection-based flatness tester can achieve the slope accuracy of 0.01°. The film test shows the capability of the tester on the surface with a variety of slopes resulting in RMS and PV values of the slope. The film appearance in terms of the amount of interference rings is correlated to the RMS value of slope derivative.

Paper Details

Date Published: 26 February 2004
PDF: 11 pages
Proc. SPIE 5265, Two- and Three-Dimensional Vision Systems for Inspection, Control, and Metrology, (26 February 2004); doi: 10.1117/12.520705
Show Author Affiliations
Shu-Guo Tang, GE Global Research Ctr. (United States)
Kevin G. Harding, GE Global Research Ctr. (United States)
Gregory O'Neil, GE Global Research Ctr. (United States)
Jin Cai, GE Global Research Ctr. (United States)


Published in SPIE Proceedings Vol. 5265:
Two- and Three-Dimensional Vision Systems for Inspection, Control, and Metrology
Bruce G. Batchelor; Heinz Hugli, Editor(s)

© SPIE. Terms of Use
Back to Top