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Proceedings Paper

Study on structural and optical properties of TiO2 thin films prepared by sol-gel process
Author(s): Shuang Zhang; Caixia Liu; Zhiyong Zhao; Wei Dong; Chuanzhou Zhang; Xindong Zhang; Yong Gan; Hailin Xue; Weiyou Chen
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Paper Abstract

TiO2 thin films were prepared at various calcinations temperatures by sol-gel process and their structural and optical properties were examined. The influence of calcinations temperature on the structural properties of the prepared TiO2 thin films was investigated by the X-ray diffraction (XRD) and atomic force microscope (AFM). The XRD results showed that TiO2 thin film was transformed into the anatase phase at 350°C, and further into rutile phase at 850°C. The AFM results show quite a smooth surface and are in reasonably well agreement with the crystallite sizes estimated by XRD peak broadening. The influence of calcinations temperature on the optical properties of the prepared TiO2 thin films was investigated by UV-Vis spectrum and variable angle incidence spectroscopic ellipsometer (VASE). The results showed the both anatase phase and rutile phase of the TiO2 thin films prepared have good optical properties in UV region.

Paper Details

Date Published: 12 May 2004
PDF: 6 pages
Proc. SPIE 5280, Materials, Active Devices, and Optical Amplifiers, (12 May 2004); doi: 10.1117/12.520458
Show Author Affiliations
Shuang Zhang, Jilin Univ. (China)
Caixia Liu, Jilin Univ. (China)
Zhiyong Zhao, Jilin Univ. (China)
Wei Dong, Jilin Univ. (China)
Chuanzhou Zhang, Institute of Jilin Province (China)
Xindong Zhang, Jilin Univ. (China)
Yong Gan, Jilin Univ. (China)
Hailin Xue, Jilin Univ. (China)
Weiyou Chen, Jilin Univ. (China)


Published in SPIE Proceedings Vol. 5280:
Materials, Active Devices, and Optical Amplifiers
Connie J. Chang-Hasnain; Dexiu Huang; Yoshiaki Nakano; Xiaomin Ren, Editor(s)

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