Share Email Print

Proceedings Paper

Generation of soft x-rays and extreme-ultraviolet (EUV) radiation using a laser-irradiated gas puff target
Author(s): Henryk Fiedorowicz
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Investigations on soft x-ray and extreme ultraviolet (EUV) emissions from a gas puff target irradiated with high-power laser pulses are presented. The aim of the studies is to develop efficient and debris-free laser plasma x-ray and EUV sources for applications in microscopy, lithography and microtechnology. Recent studies on soft x-ray and EUV lasers generated using an elongated gas puff target irradiated with picosecond pulses are presented as well.

Paper Details

Date Published: 6 October 2003
PDF: 7 pages
Proc. SPIE 5229, Laser Technology VII: Applications of Lasers, (6 October 2003); doi: 10.1117/12.520124
Show Author Affiliations
Henryk Fiedorowicz, Military Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 5229:
Laser Technology VII: Applications of Lasers
Wieslaw L. Wolinski; Zdzislaw Jankiewicz; Ryszard Romaniuk, Editor(s)

© SPIE. Terms of Use
Back to Top