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Proceedings Paper

Integrated Fabry-Perot microcavity based on surface micromachining processes
Author(s): Raluca Muller; Dimitrios Syvridis; M. Kusko; Dana Cristea; Dan Apostol; Victor S. Damian; M. Bercu; Elena Manea
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Paper Abstract

The development of MEMS microsystems can be increased by integration of optically active parts. Micromachining techniques allow the fabrication of monolithically integrated Fabry-Perot microcavities, avoiding hybrid assembly technique, which is a combination of etching and wafer bonding. These microcavities can be used as sensors, as modulators or as tunable optical filters. We investigated different mirror materials: silicon nitride and polysilicon and different sacrificial layers: polysilicon and phosphorus doped silicon dioxide (PSG), using LPCVD and CVD techniques. Different arrays and shapes for the top mirror, which is movable, were analyzed in order to establish a structural material with low tensile stress. The optical constants were determined by spectrophotometric methods. Experimental data and simulations were compared.

Paper Details

Date Published: 30 September 2003
PDF: 5 pages
Proc. SPIE 5227, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies, (30 September 2003); doi: 10.1117/12.520098
Show Author Affiliations
Raluca Muller, National Institute for R&D in Microtechnologies (Romania)
Dimitrios Syvridis, Univ. of Athens (Greece)
M. Kusko, National Institute for R&D in Microtechnologies (Romania)
Dana Cristea, National Institute for R&D in Microtechnologies (Romania)
Dan Apostol, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Victor S. Damian, National Institute for Laser, Plasma, and Radiation Physics (Romania)
M. Bercu, Univ. of Bucharest (Romania)
Elena Manea, National Institute for R&D in Microtechnologies (Romania)


Published in SPIE Proceedings Vol. 5227:
Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies
Ovidiu Iancu; Adrian Manea; Dan Cojoc, Editor(s)

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