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Proceedings Paper

Micropositioning devices for optical applications
Author(s): Constantin I. Nitu; Constantin David P. Comeaga; Bogdan S. Gramescu
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Paper Abstract

Many industrial applications (optical devices, micro/nanotechnology, etc.) require the development of advanced positioning systems. They should have submicronic resolution, often in a practically unlimited working range, as well to be stable, reliable and to have compact construction. By use of piezoelectric materials, devices having the potential to control the system structure and consequently the degrees of freedom of the mechanical components could be achieved. The paper presents some of the actuators, built and experimentally tested by the authors, as well as their associated mathematical models.

Paper Details

Date Published: 30 September 2003
PDF: 6 pages
Proc. SPIE 5227, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies, (30 September 2003); doi: 10.1117/12.520097
Show Author Affiliations
Constantin I. Nitu, Univ. Politehnica of Bucharest (Romania)
Constantin David P. Comeaga, Univ. Politehnica of Bucharest (Romania)
Bogdan S. Gramescu, Univ. Politehnica of Bucharest (Romania)

Published in SPIE Proceedings Vol. 5227:
Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies
Ovidiu Iancu; Adrian Manea; Dan Cojoc, Editor(s)

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