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Proceedings Paper

Temperature field modeling in laser-heated metals for laser cleaning of surfaces
Author(s): Mihai Oane; Ileana Apostol; Adrian Timcu
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Paper Abstract

Laser induced surface cleaning is the adequate method in a large variety of industrial domains as microelectronics, optics, photonics. By comparison to chemical and/or mechanical cleaning, laser cleaning has the advantage of a very good selectivity on the surface and in depth of the material, no surface contamination, without stress in the material volume and environmental safe. It seems that laser cleaning can be developed in a method to be currently used in microelectronic industry. For an efficient laser cleaning of metallic thin films without damage of the silicon wafer, a careful optimization of the incident laser energy, fluence, intensity and number of laser pulses is needed. We have developed an analytical procedure to study the temperature fields in pulsed laser heated solids, for a deeper knowledge of the laser-thin film substrate interaction.

Paper Details

Date Published: 30 September 2003
PDF: 6 pages
Proc. SPIE 5227, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies, (30 September 2003); doi: 10.1117/12.520075
Show Author Affiliations
Mihai Oane, National Institute for Laser, Plasma and Radiation Physics (Romania)
Ileana Apostol, National Institute for Laser, Plasma and Radiation Physics (Romania)
Adrian Timcu, National Institute for Laser, Plasma and Radiation Physics (Romania)


Published in SPIE Proceedings Vol. 5227:
Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies

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