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Proceedings Paper

Manufacturing technology of the scales used in the incremental reading systems
Author(s): Georgeta Ionascu; Despina Duminica
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Paper Abstract

The objective of this paper is to research some technological aspects concerning with the execution of the dividing (incremental) disk, which is a component part of the incremental rotating transducers. The performed investigations deal with the manufacturing process by material addition, using the selective vacuum evaporation of thin metal films through a contact metallic mask. There are presented the technological stages of execution of the masks, realized as incremental metallic disks of small sizes. The shadow effect causes the non-uniformity of thickness of the films in the mask gaps. In this regard, the authors present a mathematical model for the film profile evaluation in the case of planetary system evaporation using an electron gun as vapor source.

Paper Details

Date Published: 30 September 2003
PDF: 8 pages
Proc. SPIE 5227, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies, (30 September 2003); doi: 10.1117/12.520046
Show Author Affiliations
Georgeta Ionascu, Univ. Politehnica of Bucharest (Romania)
Despina Duminica, Univ. Politehnica of Bucharest (Romania)


Published in SPIE Proceedings Vol. 5227:
Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies
Ovidiu Iancu; Adrian Manea; Dan Cojoc, Editor(s)

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