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Proceedings Paper

MEMS SIOB design for integrated transceiver application
Author(s): Yirong Yang; Yanmin Cai; Yuelin Wang; Jianyi Yang; Yaming Wu; Le Luo; Xiqing Sun
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Paper Abstract

A novel self-aligning SIOB (SIlicon Optical Bench) for fully passive alignment of optical components is proposed for integrated transceiver modules. The coupling efficiency from laser diode directly to fiber is about 8% in theory because of severe mode mismatch and large NA difference. To pursue high coupling efficiency, a ball lens is added between laser diode and fiber. The calculations and simulations are done to optimize the optical system according to optical component specifications. The coupling efficiency is up to 45%. We designed the layout and fabricated the SIOB in (100) silicon wafer to obtain the demanding cavities by MEMS technology.

Paper Details

Date Published: 7 May 2004
PDF: 5 pages
Proc. SPIE 5281, Optical Transmission, Switching, and Subsystems, (7 May 2004); doi: 10.1117/12.519922
Show Author Affiliations
Yirong Yang, Shanghai Institute of Microsystem and Information Technology (China)
Yanmin Cai, Shanghai Institute of Microsystem and Information Technology (China)
Yuelin Wang, Shanghai Institute of Microsystem and Information Technology (China)
Jianyi Yang, Shanghai Institute of Microsystem and Information Technology (China)
Yaming Wu, Shanghai Institute of Microsystem and Information Technology (China)
Le Luo, Shanghai Institute of Microsystem and Information Technology (China)
Xiqing Sun, Versa Technology, Inc. (United States)


Published in SPIE Proceedings Vol. 5281:
Optical Transmission, Switching, and Subsystems
Cedric F. Lam; Chongcheng Fan; Norbert Hanik; Kimio Oguchi, Editor(s)

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