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Proceedings Paper

New concepts in scatterometric investigations of crystalline boules
Author(s): Andrzej L. Bajor; Wieslaw Chabros
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Paper Abstract

In this paper we present our novel concept in bulk scatterometry of single crystals. A certain primary investigations have revealed both the polarizing and depolarizing properties of real defects. These phenomena are believed to have considerable influence on defects recognition in a future device proposed here. Apart of the linear polarizer on the input beam, and the adequate linear analyzers in the scattered light beams, a computer-driven monochromator will be used for revealing defects of different dimensions, thanks to the relation between the intensity of the scattered light and the wavelength. By using such a monochromator and the computer techniques, one should be able to plot 2-D and 3-D maps of crytalline defects, as well as an intenisty of scattered light as a function of wavelength for different points in the crystal.

Paper Details

Date Published: 22 October 2003
PDF: 6 pages
Proc. SPIE 5136, Solid State Crystals 2002: Crystalline Materials for Optoelectronics, (22 October 2003); doi: 10.1117/12.518745
Show Author Affiliations
Andrzej L. Bajor, Institute of Electronic Materials Technology (Poland)
Wieslaw Chabros, Institute of Applied Optics (Poland)

Published in SPIE Proceedings Vol. 5136:
Solid State Crystals 2002: Crystalline Materials for Optoelectronics
Jaroslaw Rutkowski; Antoni Rogalski, Editor(s)

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