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Proceedings Paper

OASIS vs. GDSII stream format efficiency
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Paper Abstract

The OASIS format was designed to be a replacement for the GDSII stream format. Previous papers have reported that OASIS files can be 5-20X smaller than comparable GDSII files. This paper examines the storage capabilities of OASIS, as well as other benefits, in more detail. The primary focus of this study is on OASIS integers, deltas, point-lists, and its explicit support for rectangles & squares. We also show how the two OASIS integer types and four delta types can be implemented using a single core procedure.

Paper Details

Date Published: 17 December 2003
PDF: 11 pages
Proc. SPIE 5256, 23rd Annual BACUS Symposium on Photomask Technology, (17 December 2003); doi: 10.1117/12.518271
Show Author Affiliations
Alfred J. Reich, Motorola, Inc. (United States)
Kent H Nakagawa, DuPont Photomasks, Inc. (United States)
Robert E. Boone, Motorola, Inc. (United States)


Published in SPIE Proceedings Vol. 5256:
23rd Annual BACUS Symposium on Photomask Technology
Kurt R. Kimmel; Wolfgang Staud, Editor(s)

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