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Proceedings Paper

Common-path and phase-shift interferometer for length measurement
Author(s): Xudong Han; Hua Ai; Changyuan Han
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Paper Abstract

Polarized laser phase shifting method is adopted in this single frequency laser interferometer to solve “zero drift” of laser intensity in conventional single frequency laser interferometer. The measurement stability and repeatability are improved by means of common optical path arrangement. The resolution power of the interferometer is improved by using optical path difference doubling technique. In the experiment the main factors that affect the length measurement precision are analyzed and calculated. Results obtained are shown.

Paper Details

Date Published: 4 March 2004
PDF: 8 pages
Proc. SPIE 5263, Intelligent Manufacturing, (4 March 2004); doi: 10.1117/12.518250
Show Author Affiliations
Xudong Han, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Hua Ai, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Changyuan Han, Changchun Institute of Optics, Fine Mechanics and Physics (China)


Published in SPIE Proceedings Vol. 5263:
Intelligent Manufacturing
Bhaskaran Gopalakrishnan; Angappa Gunasekaran; Peter E. Orban, Editor(s)

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