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Proceedings Paper

Two-dimensional nanoscale patterning of fused silica, polyimide, and diamond films by interferential pulsed laser modification
Author(s): Yu. K. Verevkin; N. G. Bronnikova; V. V. Korolikhin; Yu. Yu. Guschina; V. N. Petryakov; D. O. Filatov; N. M. Bityurin
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Paper Abstract

Formation of the nanoperiodic structures in polycrystalline synthetic diamond films and in polyimide films on the fused silica substrates under nanosecond pulses of UV radiation from a three-cascade XeCl laser with the emission wavelength 308 nm was investigated. The possibility of creation the peridical structures on diamond surface by interferential pulsed laser sublimation has been demonstrated. Two different mechanism of modification of the polyimide films depending on the exposure were observed. At the exposures up to 100 mJ/cm2 humps occurred on the surface, at the exposures more than 100 mJ/cm2 the holes appear in the film. The periodical structures on fused silica surface were obtained using UV photoresist exposed by interferential pulsed laser irradiation and Ar ion etching.

Paper Details

Date Published: 26 September 2003
PDF: 6 pages
Proc. SPIE 5134, Current Research on Holography and Interferometric Methods for Measurement of Object Properties: 2000-2002, (26 September 2003); doi: 10.1117/12.518223
Show Author Affiliations
Yu. K. Verevkin, Institute of Applied Physics (Russia)
N. G. Bronnikova, Salyut-Micro (Russia)
V. V. Korolikhin, Institute of Applied Physics (Russia)
Yu. Yu. Guschina, Univ. of Nizhny Novgorod (Russia)
V. N. Petryakov, Institute of Applied Physics (Russia)
D. O. Filatov, Univ. of Nizhny Novgorod (Russia)
N. M. Bityurin, Institute of Applied Physics (Russia)

Published in SPIE Proceedings Vol. 5134:
Current Research on Holography and Interferometric Methods for Measurement of Object Properties: 2000-2002
Yuri N. Zakharov, Editor(s)

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