Share Email Print
cover

Proceedings Paper

Differential low-coherence interferometry
Author(s): Vadim V. Ivanov; Vadim A. Markelov; Sergei S. Ustavshikov
Format Member Price Non-Member Price
PDF $17.00 $21.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

New low coherence interferometric technique for remote comparison of two optical path differences utilizing common path geometry is proposed and demonstrated. The differential profiling of transparent structures by new technique is considered and demonstrated experimentally. In the experiment, nanometer accuracy of differential profiling is achieved, and high noise immunity of the proposed technique is demonstrated. The "sample-etalon" version of the technique is proposed which enables measurement of optical path difference with better noise immunity, than conventional low coherence interferometry. High noise immunity of the technique allows its efficient application for in situ precision measurements of geometric parameters of micro- and nanostructures in adverse environments.

Paper Details

Date Published: 26 September 2003
PDF: 9 pages
Proc. SPIE 5134, Current Research on Holography and Interferometric Methods for Measurement of Object Properties: 2000-2002, (26 September 2003); doi: 10.1117/12.518189
Show Author Affiliations
Vadim V. Ivanov, Institute for Physics of Microstructures (Russia)
Vadim A. Markelov, Institute for Physics of Microstructures (Russia)
Sergei S. Ustavshikov, Institute for Physics of Microstructures (Russia)


Published in SPIE Proceedings Vol. 5134:
Current Research on Holography and Interferometric Methods for Measurement of Object Properties: 2000-2002
Yuri N. Zakharov, Editor(s)

© SPIE. Terms of Use
Back to Top