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Proceedings Paper

A new in situ method for testing the optical thickness of removed transparent elements
Author(s): Iliya Emeliyanovich Kozhevatov; Evgeny A. Rudenchik; Nikolai P. Cheragin; Elena H. Kulikova
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Paper Abstract

A new remote method for a fast inspection of the optical thickness of transparent elements is developed. The method is based on the use of an high order interference of white light reflected from the sample's sides. Method gives a possibility for in situ measuring the optical thickness of the sample with accuracy to ~0.5 nm on aperture before 100mm and distance as far as some meters.

Paper Details

Date Published: 26 September 2003
PDF: 4 pages
Proc. SPIE 5134, Current Research on Holography and Interferometric Methods for Measurement of Object Properties: 2000-2002, (26 September 2003); doi: 10.1117/12.518185
Show Author Affiliations
Iliya Emeliyanovich Kozhevatov, Institute of Applied Physics (Russia)
Evgeny A. Rudenchik, Institute of Applied Physics (Russia)
Nikolai P. Cheragin, Institute of Applied Physics (Russia)
Elena H. Kulikova, Institute of Applied Physics (Russia)


Published in SPIE Proceedings Vol. 5134:
Current Research on Holography and Interferometric Methods for Measurement of Object Properties: 2000-2002
Yuri N. Zakharov, Editor(s)

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