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Proceedings Paper

New generation of capacity RF MEMS switches using PZT films
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Date Published:
Proc. SPIE 5344, MEMS/MOEMS Components and Their Applications, ; doi: 10.1117/12.518052
Show Author Affiliations
Afshin Ziaei, Thales Lab. Central de Recherches (France)
Paolo Bondavalli, Thales Lab. Central de Recherches (France)

Published in SPIE Proceedings Vol. 5344:
MEMS/MOEMS Components and Their Applications
Siegfried W. Janson; Albert K. Henning, Editor(s)

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