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Proceedings Paper

Computer simulation of the creation of 31P-doped layer in 28Si/30Si/28Si heterostructure by neutron transmutation doping
Author(s): Yuri V. Trushin; Gennadi V. Mikhailov; Evgeni E. Zhurkin; Vladimir S. Kharlamov; Alexander A. Schmidt; Fedor A. Krusenstern
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Paper Abstract

Recently various physical phenomena involving nuclear spins in semiconductors attract much attention. The problem is to produce an array of impurity atoms with nuclear spin I=1/2 in the atom matrix wiht I=0, i.e. to produce a nuclear-spin engineered semiconductor heterostructure. Both the concentration and the spatial distribution of impurity should be controlled. It is supposed that utilization of 31P atoms as an impurity in 28Si or 30Si matrix possesses significant advantages. Such a structure could be produced by neutron transmutation doping (NTD) of 28Si/30Si/28Si isotopic heterostructure, according to the nuclear reaction 30Si+n→31Si(2.6 hour)→31P. Computer simulation of the NTD process provides the conditions necessary to create 28Si/30Si:31P/28Si heterostructure with good crystal structure and well-defined distribution of impurity concentration. Simulation was carried out using parallel computing capabilities of workstation cluster of AF Ioffe Physico-Technical Institute of the Russian Academy.

Paper Details

Date Published: 10 October 2003
PDF: 4 pages
Proc. SPIE 5127, Sixth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (10 October 2003); doi: 10.1117/12.517949
Show Author Affiliations
Yuri V. Trushin, A.F. Ioffe Physico-Technical Institute (Russia)
Gennadi V. Mikhailov, A.F. Ioffe Physico-Technical Institute (Russia)
Evgeni E. Zhurkin, St. Petersburg State Technical Univ. (Russia)
Vladimir S. Kharlamov, A.F. Ioffe Physico-Technical Institute (Russia)
Alexander A. Schmidt, St. Petersburg State Technical Univ. (Russia)
Fedor A. Krusenstern, St. Petersburg State Technical Univ. (Russia)

Published in SPIE Proceedings Vol. 5127:
Sixth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
Alexander I. Melker, Editor(s)

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