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Proceedings Paper

Epitaxial metallic electrodes, quantum dots, and wires for application in solid state qubit technology
Author(s): Ludmila I. Aparshina; Anatoliy V. Chernykh; Lev Fomin; Ilia V. Malikov; Valery Yu. Vinnichenko; Gennady M. Mikhailov
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Paper Abstract

A road map for the fabrication of epitaxial metallic electrodes, quantum dots and wires is considered for potential application in solid-state qubit technology. The nanotechnology developed includes high quality low-roughness film epitaxy, probe lithography and subtractive techniques for the fabrication of epitaxial nanostructures with a lateral resolution down to 10 nm.

Paper Details

Date Published: 23 July 2003
PDF: 8 pages
Proc. SPIE 5128, First International Symposium on Quantum Informatics, (23 July 2003); doi: 10.1117/12.517878
Show Author Affiliations
Ludmila I. Aparshina, Institute of Microelectronics Technology and High Purity Materials (Russia)
Anatoliy V. Chernykh, Institute of Microelectronics Technology and High Purity Materials (Russia)
Lev Fomin, Institute of Microelectronics Technology and High Purity Materials (Russia)
Ilia V. Malikov, Institute of Microelectronics Technology and High Purity Materials (Russia)
Valery Yu. Vinnichenko, Institute of Microelectronics Technology and High Purity Materials (Russia)
Gennady M. Mikhailov, Institute of Microelectronics Technology and High Purity Materials (Russia)


Published in SPIE Proceedings Vol. 5128:
First International Symposium on Quantum Informatics
Yuri I. Ozhigov, Editor(s)

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