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Proceedings Paper

Influence of the ratio of oxygen to argon on the structure and properties of CuSc1-xMgxO2 thin films prepared by rf sputtering
Author(s): Qingnan Zhao; Xiujian Zhao; A. W. Sleight
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Paper Abstract

In this paper, the samples of CuSc1-xMgxO2 thin films were deposited on the quartz glass substrates, using a CuSc0.93Mg0.07O2 target, by rf sputtering at 120 W with a 2.0 Pa mixture gas of oxygen and argon. The gas ratio (O2/Ar) was set to 0.0, 0.1, 0.2, 0.3, 0.4, 0.6, 0.8, 1.0. The characterization of the films was carried out using a X-ray photoelectron spectroscopy (XPS) and a X-Ray diffraction (XRD). It was found that the as-deposited films were amorphous and the Mg stoichiometry in the CuSc1-xMgxO2 thin films decreased with the increase of the ratio of O2 to Ar, the amorphous samples with the Mg=0.01 to 0.04 had conductivity of 0.015 S/cm; after postprocessing of the samples were by rapid thermal annealing (RTA) at 950 °C for 3 min. in a flowing Ar atmosphere, the samples were crystal structure with preferred (101) panel orientation but it is difficult to determine that the crystal form was of a hexagonal 2H-polytype or 3R, the oxygen stoichiometry was lower than 2, the conductivity of the RTA films varied from 0.92 to 3.8 S/cm; after oxygen was intercalated to the RTA samples under oxygen pressure of 8.0 atm. at 500 °C for 10 min., the oxygen intercalated samples had a higher conductivity than that of the RTA samples, but the transmittance of the films in the wavelength of 190-780 nm was much lower than that of the as-deposited and the RTA samples. The Seebeck coefficient showed that the conductive samples were p-type. The results obtained were discussed.

Paper Details

Date Published: 16 July 2003
PDF: 6 pages
Proc. SPIE 5061, International Symposium on Photonic Glass (ISPG 2002), (16 July 2003); doi: 10.1117/12.517425
Show Author Affiliations
Qingnan Zhao, Wuhan Univ. of Technology (China)
Xiujian Zhao, Wuhan Univ. of Technology (China)
A. W. Sleight, Oregon State Univ. (United States)


Published in SPIE Proceedings Vol. 5061:
International Symposium on Photonic Glass (ISPG 2002)
Congshan Zhu, Editor(s)

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