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Proceedings Paper

Deposition of carbonic films from plasma of arc discharge without a cathode spot
Author(s): I. Gasanov; I. Gurbanov
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Paper Abstract

PVD ways of synthesis of hydrogen-free diamond-like films with high speed of a deposition of particles are analyzed. The technique of obtaining of coatings by means of a vacuum - arc discharge and of a plasma-optical filter provide the highest characteristics of -C amorphous diamond. However, the given way of synthesis is unwieldy and requires considerable costs. The capability of creation of the reactor of carbonic plasma in discharge with electron-beam heating of the cathode is consider. The control of power, entered into the graphitic cathode, allows essentially to limit a dispersion of an evaporated material.

Paper Details

Date Published: 30 September 2003
PDF: 3 pages
Proc. SPIE 5126, 17th International Conference on Photoelectronics and Night Vision Devices, (30 September 2003); doi: 10.1117/12.517370
Show Author Affiliations
I. Gasanov, Institute of Photoelectronics ANAS (Azerbaijan)
I. Gurbanov, Institute of Photoelectronics ANAS (Azerbaijan)


Published in SPIE Proceedings Vol. 5126:
17th International Conference on Photoelectronics and Night Vision Devices
Anatoly M. Filachev; Alexander I. Dirochka, Editor(s)

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