Share Email Print
cover

Proceedings Paper

A control device: a beam structure of charged particles
Author(s): A. N. Kozlov; V. D. Smolyaninov; A. P. Eremin; A. M. Filachev
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

For maintenance repeatability technological of ion processing, it is necessary to support density of ion current and distribution density of ion current by constants. For this purpose the control device of ion sources with a wide beam has been developed. In this work the device for exact reproduction structure of a beam negatively or positively charged particles, is described. Calculation mistakes of measurement currents for the given device are resulted.

Paper Details

Date Published: 30 September 2003
PDF: 5 pages
Proc. SPIE 5126, 17th International Conference on Photoelectronics and Night Vision Devices, (30 September 2003); doi: 10.1117/12.517368
Show Author Affiliations
A. N. Kozlov, Research Institute for Electron and Ion Optics (Russia)
V. D. Smolyaninov, Research Institute for Electron and Ion Optics (Russia)
A. P. Eremin, Research Institute for Electron and Ion Optics (Russia)
A. M. Filachev, Research, Development, and Production Ctr. ORION (Russia)


Published in SPIE Proceedings Vol. 5126:
17th International Conference on Photoelectronics and Night Vision Devices
Anatoly M. Filachev; Alexander I. Dirochka, Editor(s)

© SPIE. Terms of Use
Back to Top