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Proceedings Paper

Silicon katarometer with the BSC-type contacts
Author(s): Jan M. Lysko; Joanna Lozinko; Jerzy Jazwinski; Bogdan Latecki; Andrzej Panas; Marianna Gorska
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Paper Abstract

Thermal conductivity detector (TCD, katarometer) silicon chip was designed with the BSC type (Back Side Contact) electrical contacts, covered by the Cr/Au layer. Detector consists of the two elements - glass plate and silicon chip. There are two flow channels formed at the glass-silicon interface - one for detection and the other for reference. Two highly symmetrical groups of resistors were aligned with the channels and, in the last stage of the fabrication sequence, released from the silicon substrate. Some of these resistors act as the heaters, the other ones as the detectors (thermoresistors) to detect changes of the flowing gas temperature. Tubing - gas inlets and outlets - was positioned at the detector edge, in the Si-glass interface plane. BSC-type electrical contacts application enabled very convenient bonding pads location. The Contacts formation process was optimized and integrated with the other technological steps.

Paper Details

Date Published: 22 September 2003
PDF: 5 pages
Proc. SPIE 5124, Optoelectronic and Electronic Sensors V, (22 September 2003); doi: 10.1117/12.517101
Show Author Affiliations
Jan M. Lysko, Institute of Electron Technology (Poland)
Joanna Lozinko, Institute of Electron Technology (Poland)
Jerzy Jazwinski, Institute of Electron Technology (Poland)
Bogdan Latecki, Institute of Electron Technology (Poland)
Andrzej Panas, Institute of Electron Technology (Poland)
Marianna Gorska, Institute of Electron Technology (Poland)

Published in SPIE Proceedings Vol. 5124:
Optoelectronic and Electronic Sensors V
Wlodzimierz Kalita, Editor(s)

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