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Proceedings Paper

LTCC package for MEMS device
Author(s): Leszek J. Golonka; Andrzej Dziedzic; Jan Dziuban; Jaroslaw Kita; Tomasz Zawada
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Paper Abstract

LTCC package of silicon membrane katharometer was made and investigated. The package protects the katharometer against mechanical damage and makes possible an easy connection of electrical signals. Moreover, the heater and temperature sensors allow for obtaining the proper temperature of the element. The basic electrical parameters of the integrated heater and thermistors as well as measured temperature distribution are presented.

Paper Details

Date Published: 22 September 2003
PDF: 5 pages
Proc. SPIE 5124, Optoelectronic and Electronic Sensors V, (22 September 2003); doi: 10.1117/12.517066
Show Author Affiliations
Leszek J. Golonka, Wroclaw Univ. of Technology (Poland)
Andrzej Dziedzic, Wroclaw Univ. of Technology (Poland)
Jan Dziuban, Wroclaw Univ. of Technology (Poland)
Jaroslaw Kita, Wroclaw Univ. of Technology (Poland)
Tomasz Zawada, Wroclaw Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 5124:
Optoelectronic and Electronic Sensors V
Wlodzimierz Kalita, Editor(s)

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