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Proceedings Paper

Micromachining technology in optoelectronic sensing technologies
Author(s): Christophe Gorecki
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Paper Abstract

This paper examines the contribution of MEMS/MOEMS technology in the specific context of optical fiber sensing technology. A number of demonstrator sensors will be discussed, with special emphasis to sensors with micromachined integrated optic structures, nano-scale SNOM sensors, and fiber-to-waveguide coupling systems.

Paper Details

Date Published: 22 September 2003
PDF: 6 pages
Proc. SPIE 5124, Optoelectronic and Electronic Sensors V, (22 September 2003); doi: 10.1117/12.517046
Show Author Affiliations
Christophe Gorecki, Univ. de Franche-Comte (France)


Published in SPIE Proceedings Vol. 5124:
Optoelectronic and Electronic Sensors V
Wlodzimierz Kalita, Editor(s)

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