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Proceedings Paper

Three-dimensional subsurface imaging with laser ablation/AFM
Author(s): Ilmar Kink; R. Lohmus; M. Adamovich; R. Jaaniso; K. Saal; M. Lobjakas; A. Lohmus
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Paper Abstract

New method for 3D nano-scale imaging was developed that combines a traditional scanning probe techniques with a local laser ablation processing of the surface of a sample. The technology opens new possibilities for ultra precise (down to atomic resolution) subsurface studies, whereas the traditional SPM sensitivity is limited to only few atomic layers. We demonstrate that our new experimental set-up can also be used for other investigations, e.g. in in situ characterization of surface processing. The approach is potentially interesting for many applications, like volume nano-imaging, in situ studies of a stimulated nano-assembling or growth, monitoring of laser processing and cleaning, etc.

Paper Details

Date Published: 8 August 2003
PDF: 4 pages
Proc. SPIE 5123, Advanced Optical Devices, Technologies, and Medical Applications, (8 August 2003); doi: 10.1117/12.517032
Show Author Affiliations
Ilmar Kink, Univ. of Tartu (Estonia)
R. Lohmus, Univ. of Tartu (Estonia)
M. Adamovich, Univ. of Tartu (Estonia)
R. Jaaniso, Univ. of Tartu (Estonia)
K. Saal, Univ. of Tartu (Estonia)
M. Lobjakas, Univ. of Tartu (Estonia)
A. Lohmus, Univ. of Tartu (Estonia)

Published in SPIE Proceedings Vol. 5123:
Advanced Optical Devices, Technologies, and Medical Applications
Janis Spigulis; Janis Teteris; Maris Ozolinsh; Andrejs Lusis, Editor(s)

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