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Proceedings Paper

Scanning probe microscopy of nanocrystalline iridium oxide thin films
Author(s): Daniel Pailharey; D. Tonneau; A. Houel; A. Kuzmin; R. Kalendarev; J. Purans
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Paper Abstract

Structural investigations of nanocrystalline iridium oxide thin films, prepared by dc magnetron sputtering technique were performed by scanning probe microscopy (SPM). SPM studies, using both atomic force microscopy (AFM) and scanning tunnelling microscopy (STM), indicate that the thin films are composed of grains with a size of about 20-50 nm. Fine crystallinity and small RMS microroughness of the films, being well below 2 nm, make iridium oxide thin films promising candidates for nanolithographic applications. The possibility to perform nanolithograhpic processes at a scale of less than 150 nm was successfully examined in AFM and STM modes.

Paper Details

Date Published: 8 August 2003
PDF: 7 pages
Proc. SPIE 5123, Advanced Optical Devices, Technologies, and Medical Applications, (8 August 2003); doi: 10.1117/12.517031
Show Author Affiliations
Daniel Pailharey, Univ. de la Mediterranee (France)
D. Tonneau, Univ. de la Mediterranee (France)
A. Houel, Univ. de la Mediterranee (France)
A. Kuzmin, Univ. of Latvia (Latvia)
R. Kalendarev, Univ. of Latvia (Latvia)
J. Purans, Univ. of Latvia (Latvia)

Published in SPIE Proceedings Vol. 5123:
Advanced Optical Devices, Technologies, and Medical Applications
Janis Spigulis; Janis Teteris; Maris Ozolinsh; Andrejs Lusis, Editor(s)

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