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Proceedings Paper

High-precision longpass filter arrays for miniature spectrometers
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Paper Abstract

Arrays of longpass filter coatings for high order suppression in miniature spectrometers were produced by plasma-ion assisted deposition and photolithogaphy. The filter edges were imaged by optical microscopy, scanning electron microscopy, and scanning force microscopy. Whereas a positioning accuracy of about 2 microns was achieved, the width of the filter edges varied between 2 and 10 microns.

Paper Details

Date Published: 25 February 2004
PDF: 7 pages
Proc. SPIE 5250, Advances in Optical Thin Films, (25 February 2004); doi: 10.1117/12.516918
Show Author Affiliations
Stefan Jakobs, mso jena Mikroschichtoptik GmbH (Germany)
Uwe B. Schallenberg, mso jena Mikroschichtoptik GmbH (Germany)

Published in SPIE Proceedings Vol. 5250:
Advances in Optical Thin Films
Claude Amra; Norbert Kaiser; H. Angus Macleod, Editor(s)

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