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Proceedings Paper

Microscopic ESPI: better fringe qualities by the Fourier transform method
Author(s): Akram El Jarad; Gerd Gulker; Klaus D. Hinsch
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Paper Abstract

Electronic speckle pattern interferometry (ESPI) is discussed for the detection of out-of-plane deformations in small objects. For increasing the resolution in object space a laser source of small wavelength is combined with a microscope with a high numerical aperture. Fringe quality is increased by using spatial phase-shifting and the Fourier transform method to allow deformation detection also under non-optimum conditions. The efficacy will be shown in some measurements on different specimens where deformations are successfully recorded in areas down to a few micrometers in size.

Paper Details

Date Published: 27 May 2003
PDF: 7 pages
Proc. SPIE 4933, Speckle Metrology 2003, (27 May 2003); doi: 10.1117/12.516662
Show Author Affiliations
Akram El Jarad, Carl von Ossietzky Univ. Oldenburg (Germany)
Gerd Gulker, Carl von Ossietzky Univ. Oldenburg (Germany)
Klaus D. Hinsch, Carl von Ossietzky Univ. Oldenburg (Germany)

Published in SPIE Proceedings Vol. 4933:
Speckle Metrology 2003
Kay Gastinger; Ole Johan Lokberg; Svein Winther, Editor(s)

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