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Proceedings Paper

Promise and challenge of DUV speckle interferometry
Author(s): Petra Aswendt
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Paper Abstract

The paper explains the benefits and the application limits of micro speckle interferometry (MSI) and it shows the potential for improvements when a deep UV laser source is used. For the experiments, a new deep ultraviolet micro speckle interferometer (DUV-MSI) was designed operating at 266 nm of wavelength. The implemented optics enables for the measurement of both, in-plane and out-of-plane movements on the microparts. A number of practical examples are shown in the paper in order to illustrate the advantages of a shorter wavelength in speckle interferometry.

Paper Details

Date Published: 27 May 2003
PDF: 6 pages
Proc. SPIE 4933, Speckle Metrology 2003, (27 May 2003); doi: 10.1117/12.516619
Show Author Affiliations
Petra Aswendt, Fraunhofer-Institut für Werkzeugmaschinen und Umfo (Germany)

Published in SPIE Proceedings Vol. 4933:
Speckle Metrology 2003
Kay Gastinger; Ole Johan Lokberg; Svein Winther, Editor(s)

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