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Proceedings Paper

Extrinsic Fabry-Perot pressure sensor using single deeply corrugated diaphragm technique
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Paper Abstract

In this study, an analytical model, taking into account the coupled photoelastic and thermal-optical effects, is established to evaluate the temperature dependence of a single-chip silicon micromachined Fabry-Perot pressure sensor. The results show that temperature variation has significant impact on the micromachined Fabry-Perot pressure sensor with conventional flat diaphragm. A new membrane-type silicon micromachined Fabry-Perot pressure sensor with a novel deeply corrugated diaphragm is then proposed. The sensor is fabricated on a single-chip using both surface- and bulk-micromachining techniques. Both analytical and experimental results show that the cross-sensitivity to temperature of Fabry-Perot pressure sensors, can be substantially alleviated by the proposed single deeply corrugated diaphragm/mirror.

Paper Details

Date Published: 24 January 2004
PDF: 12 pages
Proc. SPIE 5346, MOEMS and Miniaturized Systems IV, (24 January 2004); doi: 10.1117/12.516589
Show Author Affiliations
D. G. Guo, Nanyang Technological Univ. (Singapore)
W. J. Wang, Nanyang Technological Univ. (Singapore)
Rongming Lin, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 5346:
MOEMS and Miniaturized Systems IV
Ayman El-Fatatry, Editor(s)

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