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Proceedings Paper

Low-cost amorphous silicon-based 160x120 uncooled microbolometer 2D array for high-volume applications
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Paper Abstract

Uncooled infrared focal plane arrays are being developed for a wide range of thermal imaging applications. Developments are focused on the improvement of their sensitivity enabling the possibility of reducing the pixel pitch in order to decrease the total system (size and weight) by using smaller optics. The amorphous silicon technology is the latest one developed by CEA / LETI and transferred to ULIS to manufacture 160 x 120 2D arrays. We developed for this device a low cost package based on existing technologies. This device is well adapted to high volume process control applications where spatial resolution (in terms of pixel number) is less important than device costs.

Paper Details

Date Published: 19 February 2004
PDF: 7 pages
Proc. SPIE 5251, Detectors and Associated Signal Processing, (19 February 2004); doi: 10.1117/12.515958
Show Author Affiliations
Cyrille Trouilleau, ULIS (France)
Arnaud Crastes, ULIS (France)
Jean-Luc Tissot, ULIS (France)
Jean-Pierre Chatard, ULIS (France)
Jean-Jacques Yon, CEA-LETI (France)
Astrid Astier, CEA-LETI (France)

Published in SPIE Proceedings Vol. 5251:
Detectors and Associated Signal Processing
Jean-Pierre Chatard; Peter N. J. Dennis, Editor(s)

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