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Proceedings Paper

Study of an ion source by an excimer laser
Author(s): Vincenzo Nassisi; A. Pedone; D. Doria
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Paper Abstract

We present the experimental results concerning the study and the development of a Laser Ion Source (LIS). By means of an excimer laser we irradiated a metal target at high power density, realizing an efficient source of multiple charged ions. The analysis of the generated plasma plume was performed for three different laser spot sizes, determining the threshold conditions of the ablation process. A diagnostic system with a Faraday cup was developed in order to detect the ion current along a propagation tube. Time-of-flight (TOF) measurements were performed, also inserting in front of the cup an adjustable voltage electrostatic barrier in order to get quantitative information about the ion flux and the kinetic energy of the produced ions. To study the plasma characteristics we evaluated the total etched material per pulse, 0.25 μg, and the fractional ionization, 12%. The ablated material distribution was monitored by optical transmission analysis of a deposited film. Applying a high voltage to the LIS extraction gap, an ion beam containing Cu+1(0.44mA), Cu+2(0.34mA), Cu+3(0.09mA), and Cu+4(0.01mA) was obtained.

Paper Details

Date Published: 10 November 2003
PDF: 5 pages
Proc. SPIE 5120, XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, (10 November 2003); doi: 10.1117/12.515846
Show Author Affiliations
Vincenzo Nassisi, Univ. degli Studi di Lecce (Italy)
A. Pedone, Univ. degli Studi di Lecce (Italy)
D. Doria, Univ. degli Studi di Lecce (Italy)

Published in SPIE Proceedings Vol. 5120:
XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
Krzysztof M. Abramski; Edward F. Plinski; Wieslaw Wolinski, Editor(s)

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