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Proceedings Paper

Pb(Zr,Ti)O3 ceramic thick films for optical device applications
Author(s): J. Cardin; D. Leduc; C. Boisrobert; Hartmut W. Gundel
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Paper Abstract

Ferroelectric PbxZryTi1-yO3 (PZT) has been prepared by chemical solution deposition (CSD) and spin-coating technique, using acetate and alkoxide precursors. Rapid thermal annealing has been employed in order to obtain crystallization in the perovskite phase. Aiming to study the optical properties of the films, PZT was deposited on different glass substrates. Structural characterization of the films was done by X-ray diffraction, morphology was investigated by SEM micrography. Using standard photography analysis, the films were qualified in terms of crack density, their appearance strongly depending on the type of substrate. Using a visible to the near infrared spectrophotometer, the transmittance normal to the surface of the films was studied. Coupling of laser light into the films by the M-lines technique allowed the determination of the refractive index and the thickness of the ferroelectric layer. A waveguiding interferometer structure of Mach-Zehnder type was realized by photolithography and wet chemical etching.

Paper Details

Date Published: 8 August 2003
PDF: 6 pages
Proc. SPIE 5122, Advanced Organic and Inorganic Optical Materials, (8 August 2003); doi: 10.1117/12.515798
Show Author Affiliations
J. Cardin, Univ. de Nantes (France)
D. Leduc, Univ. de Nantes (France)
C. Boisrobert, Univ. de Nantes (France)
Hartmut W. Gundel, Univ. de Nantes (France)

Published in SPIE Proceedings Vol. 5122:
Advanced Organic and Inorganic Optical Materials
Andris Krumins; Donats Millers; Inta Muzikante; Andris Sternbergs; Vismants Zauls, Editor(s)

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