Share Email Print
cover

Proceedings Paper

Volume holographic imaging for surface metrology with long working distances
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Volume holographic imaging (VHI) utilizes the Bragg selectivity of volume holograms to achieve 3D optical slicing. The depth resolution of VHI degrades quadratically with increasing object distance like most 3D imaging systems. We have devised an imaging scheme that takes advantage of the superior lateral resolution of VHI and a-priori surface information about the object to build a profilometer that can resolve 50 μm features at a working distance of ≈ 50 cm. We discuss the scheme and present experimental results of surface profiles of MEMS devices.

Paper Details

Date Published: 26 February 2004
PDF: 8 pages
Proc. SPIE 5265, Two- and Three-Dimensional Vision Systems for Inspection, Control, and Metrology, (26 February 2004); doi: 10.1117/12.515715
Show Author Affiliations
Arnab Sinha, Massachusetts Institute of Technology (United States)
Wenyang Sun, Massachusetts Institute of Technology (United States)
Tina Shih, Massachusetts Institute of Technology (United States)
George Barbastathis, Massachusetts Institute of Technology (United States)


Published in SPIE Proceedings Vol. 5265:
Two- and Three-Dimensional Vision Systems for Inspection, Control, and Metrology
Bruce G. Batchelor; Heinz Hugli, Editor(s)

© SPIE. Terms of Use
Back to Top