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Proceedings Paper

Pulsed laser deposition of ZnO thin films in silicon and sapphire
Author(s): Alexander I. Khudobenko; Alexander N. Zherikhin; R. T. Williams; J. Wilkinson; K. B. Ucer; G. Xiong; V. V. Voronov
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Paper Abstract

We investigated pulsed laser deposition (PLD) of ZnO films on silicon and sapphire substrates. Photoluminescence (PL), electrical properties and crystal structure of films were investigated. Stimulated emission in region 400 nm was observed.

Paper Details

Date Published: 2 September 2003
PDF: 8 pages
Proc. SPIE 5121, Laser Processing of Advanced Materials and Laser Microtechnologies, (2 September 2003); doi: 10.1117/12.515618
Show Author Affiliations
Alexander I. Khudobenko, Institute on Laser and Information Technologies (Russia)
Alexander N. Zherikhin, Institute on Laser and Information Technologies (Russia)
R. T. Williams, Wake Forest Univ. (United States)
J. Wilkinson, Wake Forest Univ. (United States)
K. B. Ucer, Wake Forest Univ. (United States)
G. Xiong, Wake Forest Univ. (United States)
V. V. Voronov, General Physics Institute (Russia)


Published in SPIE Proceedings Vol. 5121:
Laser Processing of Advanced Materials and Laser Microtechnologies
Friedrich H. Dausinger; Vitali I. Konov; Vladimir Yu. Baranov; Vladislav Ya. Panchenko, Editor(s)

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